Semiconductors ETFs

34 US-listed ETFs in the Semiconductors category, from 23 issuers, with $140.9B in assets. The largest is VanEck Semiconductor ETF (SMH) at $72.8B. The cheapest with at least $50M in assets is BBLU at 0.15%. The median fund charges 0.56%.

Funds
34
23 issuers
Assets
$140.9B
Median fee
0.56%
0.15% to 1.01%
Median 1-year return
+61.9%
price return
Net flows, May 2026
+$1.5B
from SEC filings
Best 1-year return
+109.2%
FTXL, $50M+ in assets

Net flows by month

through Jul 2026SEC filings

Net creations across these funds as reported in SEC filings. The most recent months only include funds that have filed for them; funds whose filing covers other share classes are left out.

View as a table
Net flows of Semiconductors ETFs by month, Aug 2023 to Jul 2026
MonthCreationsRedemptionsNet flowFunds reporting
Jul 2026$406M$38M+$368M3 partial
Jun 2026$43.4B$36.9B+$6.5B13 partial
May 2026$18.3B$16.8B+$1.5B16
Apr 2026$19.4B$14.4B+$5.0B15
Mar 2026$16.9B$18.7B−$1.9B15
Feb 2026$11.7B$9.2B+$2.5B15
Jan 2026$10.2B$6.7B+$3.5B15
Dec 2025$11.1B$9.5B+$1.6B15
Nov 2025$10.8B$8.9B+$1.9B15
Oct 2025$10.4B$8.7B+$1.7B15
Sep 2025$8.9B$7.7B+$1.1B15
Aug 2025$5.4B$5.6B−$128M15
Jul 2025$4.9B$5.7B−$765M15
Jun 2025$6.1B$5.5B+$595M15
May 2025$5.4B$5.4B+$33M15
Apr 2025$10.0B$9.5B+$443M15
Mar 2025$3.4B$3.8B−$418M15
Feb 2025$2.7B$4.0B−$1.3B15
Jan 2025$5.9B$5.7B+$239M15
Dec 2024$4.8B$6.7B−$1.9B15
Nov 2024$5.7B$4.9B+$824M15
Oct 2024$4.0B$3.7B+$290M15
Sep 2024$6.8B$6.4B+$364M15
Aug 2024$6.8B$5.0B+$1.9B15
Jul 2024$7.7B$6.4B+$1.3B14
Jun 2024$6.9B$5.8B+$1.0B14
May 2024$4.5B$3.2B+$1.2B14
Apr 2024$5.2B$4.3B+$915M14
Mar 2024$8.2B$6.3B+$1.9B14
Feb 2024$5.5B$4.6B+$894M14
Jan 2024$5.3B$3.8B+$1.5B14
Dec 2023$4.2B$4.1B+$30M14
Nov 2023$3.8B$3.7B+$44M14
Oct 2023$4.0B$3.7B+$231M14
Sep 2023$3.0B$3.2B−$184M14
Aug 2023$3.4B$3.2B+$242M14

All Semiconductors ETFs

# Fund Issuer Fee Assets YTD 1Y Yield 3M flow Score Holdings as of
1 SMHVanEck Semiconductor ETF VanEck 0.35% $72.8B +67.5% +74.3% 0.18% +$4.5B 83 Oct 8, 2026 issuer
2 SOXXiShares Semiconductor ETF iShares 0.33% $45.9B +85.8% +91.9% 0.22% +$6.3B 86 Oct 8, 2026 issuer
3 FBCGFidelity Blue Chip Growth ETFActive Fidelity 0.57% $7.7B +16.7% +17.9% 0.03% +$572M 67 Apr 30, 2026 SEC
4 SOXQInvesco PHLX Semiconductor ETF Invesco 0.19% $3.2B +77.4% +83.2% 0.30% +$633M 85 Oct 8, 2026 issuer
5 XSDState Street SPDR S&P Semiconductor ETF State Street SPDR 0.35% $3.1B +64.2% +55.7% 0.15% +$290M 87 Oct 8, 2026 issuer
6 PSIInvesco Semiconductors ETF Invesco 0.56% $2.8B +89.3% +101.8% 0.02% +$342M 69 Oct 8, 2026 issuer
7 TCHPT. Rowe Price Blue Chip Growth ETFActive T. Rowe Price 0.57% $2.2B +4.8% +5.5% — +$95M 59 Jun 30, 2026 SEC
8 FTXLFirst Trust Nasdaq Semiconductor ETF First Trust 0.60% $1.3B +91.8% +109.2% 0.07% −$114M 58 Jun 30, 2026 SEC
9 BBLUEA Bridgeway Blue Chip ETFActive EA Series 0.15% $481M +15.5% +15.4% 1.08% +$38M 69 Jun 30, 2026 SEC
10 SMHXVanEck Fabless Semiconductor ETF VanEck 0.35% $307M +61.5% +52.3% 0.01% +$33M 59 Jun 30, 2026 SEC
11 SHOCStrive U.S. Semiconductor ETF Strive 0.40% $246M +61.4% +68.1% 0.12% +$12M 51 Jun 30, 2026 SEC
12 BCHPPrincipal Focused Blue Chip ETFActive Principal 0.58% $238M +3.0% +1.9% — +$6.4M 42 Jun 30, 2026 SEC
13 MBCEMonarch Blue Chips Elite Index ETF Monarch 1.01% $208M — — 0.10% +$17M 27 May 31, 2026 SEC
14 FBCVFidelity Blue Chip Value ETFActive Fidelity 0.57% $189M +17.5% +21.8% 2.40% +$4.0M 51 Apr 30, 2026 SEC
15 CHPSXtrackers Semiconductor Select Equity ETF Xtrackers 0.15% $130M +89.6% +109.1% 0.34% +$16M 66 May 29, 2026 SEC
16 AHBMAmplify Top 10 Asia Memory ETF Amplify — — — — — — — —
17 AINFDefiance Inference AI Chip ETFActive Defiance — — — — — — — —
18 CAPADefiance AI Capacitors & MLCC ETFActive Defiance — — — — — — — —
19 CCMLRoundhill MLCC & Electronic Components ETFActive Roundhill — — — — — — — —
20 CPUAmplify Top 10 Semiconductors ETF Amplify — — — — — — — —
21 DISKTema Memory ETFActive Tema 0.75% — — — — — 32 —
22 DRAMRoundhill Memory ETFActive Roundhill — — — — — — — —
23 EUVCorgi Lithography & Semiconductor Photonics ETF Corgi — — — — — +$376M — —
24 FOTOTuttle Capital Pure Play Photonics ETF Tuttle Capital — — — — — — — —
25 HBMXTuttle Capital Concentrated Memory Stack ETF Tuttle Capital — — — — — — — —
26 KMEMKurv Memory Select ETFActive Kurv 0.65% — — — — — 33 —
27 LAZRTema Photonics & Optical ETFActive Tema 0.75% — +23796.0% — — — 33 —
28 LUMAKraneShares Photonic and Optical ETF KraneShares — — — — — — — —
29 LYTERoundhill Photonics & Optics ETFActive Roundhill — — — — — — — —
30 MLCCGlobal X MLCC & Electronic Components ETF Global X — — — — — — 10 Oct 9, 2026 issuer
31 NRAMYorkville America Next Generation Memory Index ETF Yorkville — — — — — — — —
32 PHOXAura AI Photonics ETF Aura — — — — — — — —
33 PRAMDefiance Memory & Photonics ETFActive Defiance — — — — — — — —
34 PSOXTema MLCC & PowerSemi ETFActive Tema — — — — — — — —

Sorted by assets; click a column to re-sort. 3M flow is each fund's latest three reported months. Returns are price returns and exclude distributions.

Other Thematic categories

Fund data comes from each fund's SEC filings and issuer disclosures and is shown with the date it is as of. SEC portfolio and flow filings become public about 60 days after the period they cover. Nothing here is investment advice; see Terms.