Semiconductors ETFs
34 US-listed ETFs in the Semiconductors category, from 23 issuers, with $140.9B in assets. The largest is VanEck Semiconductor ETF (SMH) at $72.8B. The cheapest with at least $50M in assets is BBLU at 0.15%. The median fund charges 0.56%.
Net flows by month
through Jul 2026SEC filingsNet creations across these funds as reported in SEC filings. The most recent months only include funds that have filed for them; funds whose filing covers other share classes are left out.
View as a table
| Month | Creations | Redemptions | Net flow | Funds reporting |
|---|---|---|---|---|
| Jul 2026 | $406M | $38M | +$368M | 3 partial |
| Jun 2026 | $43.4B | $36.9B | +$6.5B | 13 partial |
| May 2026 | $18.3B | $16.8B | +$1.5B | 16 |
| Apr 2026 | $19.4B | $14.4B | +$5.0B | 15 |
| Mar 2026 | $16.9B | $18.7B | −$1.9B | 15 |
| Feb 2026 | $11.7B | $9.2B | +$2.5B | 15 |
| Jan 2026 | $10.2B | $6.7B | +$3.5B | 15 |
| Dec 2025 | $11.1B | $9.5B | +$1.6B | 15 |
| Nov 2025 | $10.8B | $8.9B | +$1.9B | 15 |
| Oct 2025 | $10.4B | $8.7B | +$1.7B | 15 |
| Sep 2025 | $8.9B | $7.7B | +$1.1B | 15 |
| Aug 2025 | $5.4B | $5.6B | −$128M | 15 |
| Jul 2025 | $4.9B | $5.7B | −$765M | 15 |
| Jun 2025 | $6.1B | $5.5B | +$595M | 15 |
| May 2025 | $5.4B | $5.4B | +$33M | 15 |
| Apr 2025 | $10.0B | $9.5B | +$443M | 15 |
| Mar 2025 | $3.4B | $3.8B | −$418M | 15 |
| Feb 2025 | $2.7B | $4.0B | −$1.3B | 15 |
| Jan 2025 | $5.9B | $5.7B | +$239M | 15 |
| Dec 2024 | $4.8B | $6.7B | −$1.9B | 15 |
| Nov 2024 | $5.7B | $4.9B | +$824M | 15 |
| Oct 2024 | $4.0B | $3.7B | +$290M | 15 |
| Sep 2024 | $6.8B | $6.4B | +$364M | 15 |
| Aug 2024 | $6.8B | $5.0B | +$1.9B | 15 |
| Jul 2024 | $7.7B | $6.4B | +$1.3B | 14 |
| Jun 2024 | $6.9B | $5.8B | +$1.0B | 14 |
| May 2024 | $4.5B | $3.2B | +$1.2B | 14 |
| Apr 2024 | $5.2B | $4.3B | +$915M | 14 |
| Mar 2024 | $8.2B | $6.3B | +$1.9B | 14 |
| Feb 2024 | $5.5B | $4.6B | +$894M | 14 |
| Jan 2024 | $5.3B | $3.8B | +$1.5B | 14 |
| Dec 2023 | $4.2B | $4.1B | +$30M | 14 |
| Nov 2023 | $3.8B | $3.7B | +$44M | 14 |
| Oct 2023 | $4.0B | $3.7B | +$231M | 14 |
| Sep 2023 | $3.0B | $3.2B | −$184M | 14 |
| Aug 2023 | $3.4B | $3.2B | +$242M | 14 |
All Semiconductors ETFs
| # | Fund | Issuer | Fee | Assets | YTD | 1Y | Yield | 3M flow | Score | Holdings as of |
|---|---|---|---|---|---|---|---|---|---|---|
| 1 | SMHVanEck Semiconductor ETF | VanEck | 0.35% | $72.8B | +67.5% | +74.3% | 0.18% | +$4.5B | 83 | Oct 8, 2026 issuer |
| 2 | SOXXiShares Semiconductor ETF | iShares | 0.33% | $45.9B | +85.8% | +91.9% | 0.22% | +$6.3B | 86 | Oct 8, 2026 issuer |
| 3 | FBCGFidelity Blue Chip Growth ETFActive | Fidelity | 0.57% | $7.7B | +16.7% | +17.9% | 0.03% | +$572M | 67 | Apr 30, 2026 SEC |
| 4 | SOXQInvesco PHLX Semiconductor ETF | Invesco | 0.19% | $3.2B | +77.4% | +83.2% | 0.30% | +$633M | 85 | Oct 8, 2026 issuer |
| 5 | XSDState Street SPDR S&P Semiconductor ETF | State Street SPDR | 0.35% | $3.1B | +64.2% | +55.7% | 0.15% | +$290M | 87 | Oct 8, 2026 issuer |
| 6 | PSIInvesco Semiconductors ETF | Invesco | 0.56% | $2.8B | +89.3% | +101.8% | 0.02% | +$342M | 69 | Oct 8, 2026 issuer |
| 7 | TCHPT. Rowe Price Blue Chip Growth ETFActive | T. Rowe Price | 0.57% | $2.2B | +4.8% | +5.5% | — | +$95M | 59 | Jun 30, 2026 SEC |
| 8 | FTXLFirst Trust Nasdaq Semiconductor ETF | First Trust | 0.60% | $1.3B | +91.8% | +109.2% | 0.07% | −$114M | 58 | Jun 30, 2026 SEC |
| 9 | BBLUEA Bridgeway Blue Chip ETFActive | EA Series | 0.15% | $481M | +15.5% | +15.4% | 1.08% | +$38M | 69 | Jun 30, 2026 SEC |
| 10 | SMHXVanEck Fabless Semiconductor ETF | VanEck | 0.35% | $307M | +61.5% | +52.3% | 0.01% | +$33M | 59 | Jun 30, 2026 SEC |
| 11 | SHOCStrive U.S. Semiconductor ETF | Strive | 0.40% | $246M | +61.4% | +68.1% | 0.12% | +$12M | 51 | Jun 30, 2026 SEC |
| 12 | BCHPPrincipal Focused Blue Chip ETFActive | Principal | 0.58% | $238M | +3.0% | +1.9% | — | +$6.4M | 42 | Jun 30, 2026 SEC |
| 13 | MBCEMonarch Blue Chips Elite Index ETF | Monarch | 1.01% | $208M | — | — | 0.10% | +$17M | 27 | May 31, 2026 SEC |
| 14 | FBCVFidelity Blue Chip Value ETFActive | Fidelity | 0.57% | $189M | +17.5% | +21.8% | 2.40% | +$4.0M | 51 | Apr 30, 2026 SEC |
| 15 | CHPSXtrackers Semiconductor Select Equity ETF | Xtrackers | 0.15% | $130M | +89.6% | +109.1% | 0.34% | +$16M | 66 | May 29, 2026 SEC |
| 16 | AHBMAmplify Top 10 Asia Memory ETF | Amplify | — | — | — | — | — | — | — | — |
| 17 | AINFDefiance Inference AI Chip ETFActive | Defiance | — | — | — | — | — | — | — | — |
| 18 | CAPADefiance AI Capacitors & MLCC ETFActive | Defiance | — | — | — | — | — | — | — | — |
| 19 | CCMLRoundhill MLCC & Electronic Components ETFActive | Roundhill | — | — | — | — | — | — | — | — |
| 20 | CPUAmplify Top 10 Semiconductors ETF | Amplify | — | — | — | — | — | — | — | — |
| 21 | DISKTema Memory ETFActive | Tema | 0.75% | — | — | — | — | — | 32 | — |
| 22 | DRAMRoundhill Memory ETFActive | Roundhill | — | — | — | — | — | — | — | — |
| 23 | EUVCorgi Lithography & Semiconductor Photonics ETF | Corgi | — | — | — | — | — | +$376M | — | — |
| 24 | FOTOTuttle Capital Pure Play Photonics ETF | Tuttle Capital | — | — | — | — | — | — | — | — |
| 25 | HBMXTuttle Capital Concentrated Memory Stack ETF | Tuttle Capital | — | — | — | — | — | — | — | — |
| 26 | KMEMKurv Memory Select ETFActive | Kurv | 0.65% | — | — | — | — | — | 33 | — |
| 27 | LAZRTema Photonics & Optical ETFActive | Tema | 0.75% | — | +23796.0% | — | — | — | 33 | — |
| 28 | LUMAKraneShares Photonic and Optical ETF | KraneShares | — | — | — | — | — | — | — | — |
| 29 | LYTERoundhill Photonics & Optics ETFActive | Roundhill | — | — | — | — | — | — | — | — |
| 30 | MLCCGlobal X MLCC & Electronic Components ETF | Global X | — | — | — | — | — | — | 10 | Oct 9, 2026 issuer |
| 31 | NRAMYorkville America Next Generation Memory Index ETF | Yorkville | — | — | — | — | — | — | — | — |
| 32 | PHOXAura AI Photonics ETF | Aura | — | — | — | — | — | — | — | — |
| 33 | PRAMDefiance Memory & Photonics ETFActive | Defiance | — | — | — | — | — | — | — | — |
| 34 | PSOXTema MLCC & PowerSemi ETFActive | Tema | — | — | — | — | — | — | — | — |
Sorted by assets; click a column to re-sort. 3M flow is each fund's latest three reported months. Returns are price returns and exclude distributions.
Other Thematic categories
Fund data comes from each fund's SEC filings and issuer disclosures and is shown with the date it is as of. SEC portfolio and flow filings become public about 60 days after the period they cover. Nothing here is investment advice; see Terms.