Semiconductors ETFs
40 US-listed ETFs in the Semiconductors theme, from 25 issuers, with $141.5B in assets. The largest is VanEck Semiconductor ETF (SMH) at $72.8B. The cheapest with at least $50M in assets is BBLU at 0.15%. The median fund charges 0.57%.
Funds
40
25 issuers
Assets
$141.5B
Median fee
0.57%
0.15% to 1.01%
Median 1-year return
+61.9%
price return
Median yield
0.13%
trailing 12 months
Best 1-year return
+109.2%
FTXL, $50M+ in assets
All Semiconductors ETFs
| # | Fund | Category | Fee | Assets | YTD | 1Y | Yield | 3M flow | Score | Holdings as of |
|---|---|---|---|---|---|---|---|---|---|---|
| 1 | SMHVanEck Semiconductor ETF | Semiconductors | 0.35% | $72.8B | +67.5% | +74.3% | 0.18% | +$4.5B | 83 | Oct 8, 2026 issuer |
| 2 | SOXXiShares Semiconductor ETF | Semiconductors | 0.33% | $45.9B | +85.8% | +91.9% | 0.22% | +$6.3B | 86 | Oct 8, 2026 issuer |
| 3 | FBCGFidelity Blue Chip Growth ETFActive | Semiconductors | 0.57% | $7.7B | +16.7% | +17.9% | 0.03% | +$572M | 67 | Apr 30, 2026 SEC |
| 4 | SOXQInvesco PHLX Semiconductor ETF | Semiconductors | 0.19% | $3.2B | +77.4% | +83.2% | 0.30% | +$633M | 85 | Oct 8, 2026 issuer |
| 5 | XSDState Street SPDR S&P Semiconductor ETF | Semiconductors | 0.35% | $3.1B | +64.2% | +55.7% | 0.15% | +$290M | 87 | Oct 8, 2026 issuer |
| 6 | PSIInvesco Semiconductors ETF | Semiconductors | 0.56% | $2.8B | +89.3% | +101.8% | 0.02% | +$342M | 69 | Oct 8, 2026 issuer |
| 7 | TCHPT. Rowe Price Blue Chip Growth ETFActive | Semiconductors | 0.57% | $2.2B | +4.8% | +5.5% | — | +$95M | 59 | Jun 30, 2026 SEC |
| 8 | FTXLFirst Trust Nasdaq Semiconductor ETF | Semiconductors | 0.60% | $1.3B | +91.8% | +109.2% | 0.07% | −$114M | 58 | Jun 30, 2026 SEC |
| 9 | BBLUEA Bridgeway Blue Chip ETFActive | Semiconductors | 0.15% | $481M | +15.5% | +15.4% | 1.08% | +$38M | 69 | Jun 30, 2026 SEC |
| 10 | KSTRKraneShares China Technology & Semiconductor STAR 50 Index ETF | Single Country | 0.89% | $362M | +13.3% | +5.1% | — | +$129M | 41 | Jun 30, 2026 SEC |
| 11 | SMHXVanEck Fabless Semiconductor ETF | Semiconductors | 0.35% | $307M | +61.5% | +52.3% | 0.01% | +$33M | 59 | Jun 30, 2026 SEC |
| 12 | CHPXGlobal X AI Semiconductor & Quantum ETF | Quantum Computing | 0.50% | $258M | +84.6% | +83.4% | 0.03% | +$10M | 48 | Oct 9, 2026 issuer |
| 13 | SHOCStrive U.S. Semiconductor ETF | Semiconductors | 0.40% | $246M | +61.4% | +68.1% | 0.12% | +$12M | 51 | Jun 30, 2026 SEC |
| 14 | BCHPPrincipal Focused Blue Chip ETFActive | Semiconductors | 0.58% | $238M | +3.0% | +1.9% | — | +$6.4M | 42 | Jun 30, 2026 SEC |
| 15 | MBCEMonarch Blue Chips Elite Index ETF | Semiconductors | 1.01% | $208M | — | — | 0.10% | +$17M | 27 | May 31, 2026 SEC |
| 16 | FBCVFidelity Blue Chip Value ETFActive | Semiconductors | 0.57% | $189M | +17.5% | +21.8% | 2.40% | +$4.0M | 51 | Apr 30, 2026 SEC |
| 17 | CHPSXtrackers Semiconductor Select Equity ETF | Semiconductors | 0.15% | $130M | +89.6% | +109.1% | 0.34% | +$16M | 66 | May 29, 2026 SEC |
| 18 | SMHCVanEck China Semiconductor ETF | Single Country | 0.65% | $6.8M | — | — | — | +$6.2M | 26 | Jun 30, 2026 SEC |
| 19 | AHBMAmplify Top 10 Asia Memory ETF | Semiconductors | — | — | — | — | — | — | — | — |
| 20 | AINFDefiance Inference AI Chip ETFActive | Semiconductors | — | — | — | — | — | — | — | — |
| 21 | CAPADefiance AI Capacitors & MLCC ETFActive | Semiconductors | — | — | — | — | — | — | — | — |
| 22 | CCMLRoundhill MLCC & Electronic Components ETFActive | Semiconductors | — | — | — | — | — | — | — | — |
| 23 | CPUAmplify Top 10 Semiconductors ETF | Semiconductors | — | — | — | — | — | — | — | — |
| 24 | CRAMDefiance China Memory ETFActive | Single Country | — | — | — | — | — | — | — | — |
| 25 | DISKTema Memory ETFActive | Semiconductors | 0.75% | — | — | — | — | — | 32 | — |
| 26 | DRAMRoundhill Memory ETFActive | Semiconductors | — | — | — | — | — | — | — | — |
| 27 | EUVCorgi Lithography & Semiconductor Photonics ETF | Semiconductors | — | — | — | — | — | +$376M | — | — |
| 28 | FOTOTuttle Capital Pure Play Photonics ETF | Semiconductors | — | — | — | — | — | — | — | — |
| 29 | HBMXTuttle Capital Concentrated Memory Stack ETF | Semiconductors | — | — | — | — | — | — | — | — |
| 30 | KCHPKICK Korea Semiconductor Index ETF | Single Country | — | — | — | — | — | — | — | — |
| 31 | KMEMKurv Memory Select ETFActive | Semiconductors | 0.65% | — | — | — | — | — | 33 | — |
| 32 | KSMHxETFs Korea AI Semiconductor | Single Country | — | — | — | — | — | — | — | — |
| 33 | LAZRTema Photonics & Optical ETFActive | Semiconductors | 0.75% | — | +23796.0% | — | — | — | 33 | — |
| 34 | LUMAKraneShares Photonic and Optical ETF | Semiconductors | — | — | — | — | — | — | — | — |
| 35 | LYTERoundhill Photonics & Optics ETFActive | Semiconductors | — | — | — | — | — | — | — | — |
| 36 | MLCCGlobal X MLCC & Electronic Components ETF | Semiconductors | — | — | — | — | — | — | 10 | Oct 9, 2026 issuer |
| 37 | NRAMYorkville America Next Generation Memory Index ETF | Semiconductors | — | — | — | — | — | — | — | — |
| 38 | PHOXAura AI Photonics ETF | Semiconductors | — | — | — | — | — | — | — | — |
| 39 | PRAMDefiance Memory & Photonics ETFActive | Semiconductors | — | — | — | — | — | — | — | — |
| 40 | PSOXTema MLCC & PowerSemi ETFActive | Semiconductors | — | — | — | — | — | — | — | — |
Sorted by assets; click a column to re-sort. 3M flow is each fund's latest three reported months. Returns are price returns and exclude distributions.
Fund data comes from each fund's SEC filings and issuer disclosures and is shown with the date it is as of. SEC portfolio and flow filings become public about 60 days after the period they cover. Nothing here is investment advice; see Terms.